Item – Theses Canada

OCLC number
20757143
Author
Misra, Durgamadhab,1958-
Title
Characterization and control of reactive ion etching induced surface damage
Degree
Ph. D. -- University of Waterloo, 1988
Publisher
Ottawa : National Library of Canada, 1989.
Description
3 microfiches (213 frames) :illustrations.
Notes
Includes bibliographical references.
ISBN
031545301X
9780315453012