Item – Theses Canada

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OCLC number
173247919
Author
Sun, Yang-Wen,1978-
Title
Dense and porous ZnO thin films produced by pulsed laser deposition.
Degree
M. Sc. -- University of Alberta, 2005
Publisher
Ottawa : Library and Archives Canada = Bibliothèque et Archives Canada, [2006]
Description
2 microfiches
Notes
Includes bibliographical references.
Abstract
The study of fabrication and characterization of dense and porous Zinc Oxide (ZnO) thin films by Pulsed Laser Deposition is presented here. ZnO thin films were deposited onto p-type Si (100) substrates at room temperature using 15 ns krypton fluoride (248 nm) laser pulses in vacuum or in ~10-1 torr oxygen background with or without annealing. In additional to dense ZnO thin films, porous ZnO thin films consisting of isolated straight columns and helical structures with diameters on the order of 100 nm were produced. The structural, compositional, morphological, and photoluminescence properties of these dense and porous ZnO thin films were studied in detail. We have also measured the absolute UV emission in terms of number of photons per steradian for these films. It was found that both O2 background during deposition and annealing after deposition are essential to give a good crystalline structure and strong UV emission.
ISBN
0494081848
9780494081846