Skip to main content
Skip to "About government"
Language selection
Français
Government of Canada /
Gouvernement du Canada
Search
Search the website
Search
Menu
Main
Menu
Jobs and the workplace
Immigration and citizenship
Travel and tourism
Business and industry
Benefits
Health
Taxes
Environment and natural resources
National security and defence
Culture, history and sport
Policing, justice and emergencies
Transport and infrastructure
Canada and the world
Money and finances
Science and innovation
You are here:
Canada.ca
Library and Archives Canada
Services
Services for galleries, libraries, archives and museums (GLAMs)
Theses Canada
Item – Theses Canada
Page Content
Item – Theses Canada
OCLC number
1154313364
Link(s) to full text
LAC copy
LAC copy
Author
Kuang, Li-chao,1963-
Title
Deep-level transient spectroscopy, DLTS, for the determination of trap parameters in semiconductor devices.
Degree
M. Sc. -- University of Manitoba, 1997
Publisher
Winnipeg, Manitoba : University of Manitoba, 1997.
Description
1 online resource
Notes
Includes bibliographical references.
Abstract
The design principle and the data acquisition processing of a full-curve computerized deep-level transient spectroscopy (DLTS) system are described in detail. This system is more reliable, flexible and accurate than the conventional methods in the determination of deep level traps in semiconductor devices. The procedures for the evaluation of the bulk traps for p-n junctions and for the evaluation of both the bulk traps and interface states for MOS capacitors are fully discussed. For MOS capacitors, the analysis is based on the rate window concept. The method of minimizing the error in determining the trap energy levels from the transient capacitance spectra is given. We have used the MOS capacitors produced in our Materials and Devices Research Laboratory as an example to demonstrate how to use our new DLTS system to determine their trap parameters. It is found that there are two deep trap levels in the semiconductor bulk and that the interface states are distributed in the forbidden gap.
Other link(s)
hdl.handle.net
mspace.lib.umanitoba.ca
ISBN
0612233731
9780612233737
Date modified:
2022-09-01